It is important to enhance the chemical stability of semiconductor nanowires in FETs. They must withstand the saline physiological conditions to avoid any drift of the electrical signal. For this purpose, we develop networks of parallel nanowires, Si core passivated by a SiC shell.
SiC is a particularly stable and chemically inert semiconductor already used for power electronics. In addition, it is biocompatible and its technology is compatible with that of Si.
Our group reported the possibility of covalent grafting of DNA on various nanostructured surfaces including those of SiC2. We have developed the world's first NWFET demonstrator based on unique SiC nanowires for the electrical detection of DNA3.
At the present time, we are studying different passivation pathways in accordance with Si nanowires, while retaining their electrical characteristics. In addition, this architecture of parallel Si / SiC nanowires will allow the fabrication of microfluidic channels (Fig.) for real-time electrical detection of biomolecules of strategic interest (DNA ...).
Date of update October 21, 2019
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