LMGP - rubrique Laboratoire - Minatec 2022

SEMINAIRE ext. LMGP - 30/01/2024 - Clémence BADIE

“ Atomic layer deposition processes for alternative energy applications ”

PhD(1), Clémence – Badie
(1) Post-doc.

Plasma & Materials Processing, Eindhoven University of Technology,


Atomic layer deposition (ALD) is a technique able to coat conformally (continuously and uniformly) a large variety of substrates with low defects thin films. These capabilities promote its use in various applications, historically mainly in microelectronics which is still a driving force of implementation and modification of the technique. However, ALD is also used for energy related applications such as in electrochemistry, photovoltaics and optoelectronics.
I will present in this seminar my research studies related to the development of alternative energies using ALD. My thesis was about the fabrication of a hydrogen separative membrane
using TiN and Pd nanoparticles using ALD. We took the opportunity to investigate the TiN process in details, using thermal activation (classic ALD) and plasma assistance (plasma enhanced ALD, PE-ALD). This comprehensive study provided us a better understanding of the influence of the N-source on the physico-chemical properties of the thin films obtained. These findings enabled us to assess these layers as transparent conductive films (TCFs) for optoelectronics. In my current position, we are developing MnOx films by ALD and PE-ALD as electrocatalysts for the oxygen evolution reaction (OER, one half reaction of water electrolysis).

These studies are highlighting the versatility of the ALD technique.

Short Bio/CV

After finishing my university education in Montpellier and Marseille, I obtained my Master degree in Material Sciences and Electrochemistry. I completed my PhD at Centre Interdisciplinaire de Nanosciences de Marseille (CINaM) under the supervision of Dr. L Santinacci, in collaboration with Dr. M. Bechelany from Institut Européen des Membranes (IEM). I am currently a post-doc at TU/e, Eindhoven, The Netherlands, under the supervision of Prof. M. Creatore and Dr. M. Costa-Figueiredo. The main topic of my research is Atomic Layer
Deposition for alternative energy related applications.

Infos lieu
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