SEMINAR LMGP - 06/02/2024 - Samuel Margueron

Samuel Margueron
Teacher-Researcher Supmicrotech-ENSMM
Head of the piezoMEMS team,
Time-Frequency Department
FEMTO-ST Institute
siteweb: https://teams.femto-st.fr/piezomems

Abstract:

 LiNbO3 single crystals are well-known materials for photonic and micro-acoustic applications in the telecommunications industry. Thin films obtained by CVD and PVD of LiNbO3 are under development for industrial applications but difficulties still lie in obtaining films with acceptable physical properties. This talk will present an intermediate technology for bonding-polishing single-crystal LiNbO3 crystals. This technology provides access to monocrystalline quality films with controlled thicknesses. After a presentation of bonding and polishing techniques, we will discuss the properties and applications of these technologies of these lead-free piezoelectric films.