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PAper by Octavio GRANIEL-TAMAYO 2021

Published on March 10, 2021
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News from March 10, 2021 to May 21, 2021

Th epaper "Liquid atomic layer deposition as an emergent technology for the fabrication of thin films" has been published in Dalton Transactions

Here you will find Octavio's paper

"Atomic layer deposition (ALD) is widely recognized as a unique chemical vapor deposition technique for the fabrication of thin films with a high conformality and precise thickness control down to the Ångstrom level, therefore allowing surface and interface nanoengineering. However, several challenges such as the availability of chemical precursors for ALD and the use of vacuum conditions have hampered its widespread adoption and scalability for mass production. In recent years, the liquid phase homologous of ALD, liquid atomic layer deposition (LALD), has emerged as a much simpler and versatile strategy to overcome some of the current constraints of ALD. This perspective describes the different strategies that have been explored to achieve conformality and sub-nanometer thickness control with LALD, as well as the current challenges it faces to become part of the thin-film community toolbox, in particular its automation and compatibility with different types of substrates. In this regard, the important role of LALD as a complimentary technology to ALD is emphasized by comparing the different pathways to deposit a same material and the precursors used to do so."


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Date of update May 31, 2021

Université Grenoble Alpes