Zinc oxide has recently attracted much attention as a sustainable and high potential material for piezoelectric application as it is an abundant and biocompatible semiconducting compound with wurzite structure. However, the influence of grown conditions on the piezoelectric properties of zinc oxide thin films and nanowires has not been completely elucidated. By varying the growth conditions in pulsed-liquid injection metal–organic chemical vapor deposition, we study the morphologies transition of zinc oxide along with the evolution of their physical properties. The crystallinity and orientation of deposited ZnO nanostructures are analysed and compared with its resistivity, piezoelectric amplitude and polarities. The investigation has shown a strong correlation between the structural and electrical properties of zinc oxide with its piezoelectric property, revealing many ways of significantly improving the piezoelectric performance.
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